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IDC Ergoloader Single Unified PGV

IDC's 300mm Single Unified Person Guided Vehicle, the Ergoloader, is designed to facilitate the manual transfer of 300mm FOUPs, FOSBs and Frame Cassettes. It is an ergonomically correct device that allows operators to safely handle 300mm Wafer Carriers both for Frontend and Backend, that typically weigh up to 18 Kg each.

The PGV can easily interface with any process and assembly tool that conforms to the SEMI E15.1 loadport standard, and is equipped with a SEMI E83 compatible PGV Docking Flange.

Download IDC Ergoloader PGV (SINGLE) brochure.

Transfer Mechanism

IDC Ergoloader Single Unified SD PGV

IDC's 300mm Single SD (Static Docking) Person Guided Vehicle, the Ergoloader, is designed to facilitate the manual intrabay transfer of 300mm FOUPs between stockers and process tools within a bay. It is an ergonomically correct device that allows operators to safely handle 300mm FOUPs that typically weigh up to 8 Kg each. The PGV can easily interface with any process tool that conforms to the SEMI E15.1 loadport standard, and is equipped with a SEMI E83 compatible PGV Docking Flange.

Typical applications for PGV loading within a fab include: Metrology Steps, Engineering/Hot Lots, Intrabay AMHS back-up (Hoist Fall-over), and Low Throughput Manual Bays.

Download PGV SD brochure.

IDC Single Unified RSA PGV

IDC's 300mm "single RSA" Person Guided Vehicle, the Ergoloader, is designed to facilitate the manual intrabay transfer of 300mm FOUPs FOSBs and Frame Cassettes between stockers and process tools within a bay.

This unique PGV is operated from the rear and both sides, allowing operation in narrow bays.

It is an ergonomically correct device that allows operators to safely handle 300mm FOUPs that typically weigh up to 18 Kg each.

The PGV can easily interface with any process tool that conforms to the SEMI E15.1 load port standard, and is equipped with a SEMI E83 compatible PGV docking flange.

Typical applications for PGV loading within a fab include: Metrology Steps, Engineering/Hot Lots, Intrabay AMHS back-up (Hoist Fail-over), and Low Throughput Manual Bays.

Download PGV RSA brochure.

IDC Person Guided Vehicle 450mm
(PGV-450mm)

AVAILABLE NOW

The product can be adjusted to the customer's special and non-standard applications.

Please contact us for further information.

Download PGV 450 mm brochure.

IDC Docking Flange Kit (DFK)

IDC's Docking Flange kit (DFK) is a perforated floor mountable device for 300 mm tool load.

The DFK fully complies with SEMI E83, E15 and E64 SEMI standards.

The special design of the DFK enables to mount it to various types of perforated floors without any special preparations.

It is easily aligned with the tool load port by the IDC Alignment Tool Kit (ATK).

Download DFK brochure.

Dual Buffer Station with PGV and Cassette

Buffer Station with kinematic coupling pins interface, to be used with all IDC Single PGV configurations for exchange process of carriers.

The IDC Buffer Station has full compliance with E15.1 and E64 SEMI standards.